PVD Hard Coating Equipment PVN500-C series
PVN 500-C series feature
- Using cathode arc coating technologies, 6 inch round cathode source.
- Mode：PVN500-C4；PVN500-C8.
- The vacuum components are imported from aboard.
- Special geometries target shutter
- The octagonal stainless steel chamber, and double walled jacket cooling.
- Install 4 sets Heater, and the temperature can be uniformly heated to 450℃.
- Deploy ultrahigh vacuum turbo pump, and ultimate pressure 5*10-5 torr
- Triple rotation of 8 axis carousel to improve coating uniformity
- Lift table for Loading/Unloading
- Fully automatic process, able to remote analyzing and program debugging
SEM Cross-section of AlTiN coating
SEM Cross-section of TiX-H coating
