PEC650-S series

PEC650-S series

Sputter & Me/DLC coating system PEC650-S series

PEC650-S series feature

  • Install 4 sets sputter source in 4 sides, it could be used as decorative coating.
  • The structure is fine and smooth, also smaller residual stress by sputter system. The most flexible coating system.
  • Conform PVD and PECVD system, it can coat Me/DLC composite films. The Sputter system made column structure of nitride coating, and provided lubricating of DLC coating by PECVD system.
  • Applications for automobile parts, wear resistance dies etc.

SEM Cross-section of Me/DLC coating