PEC650-S series
Sputter & Me/DLC coating system PEC650-S series
PEC650-S series feature
- Install 4 sets sputter source in 4 sides, it could be used as decorative coating.
- The structure is fine and smooth, also smaller residual stress by sputter system. The most flexible coating system.
- Conform PVD and PECVD system, it can coat Me/DLC composite films. The Sputter system made column structure of nitride coating, and provided lubricating of DLC coating by PECVD system.
- Applications for automobile parts, wear resistance dies etc.
SEM Cross-section of Me/DLC coating
